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Watch Googly online free movie without downloading. Stream Googly movie online free in HD. Quality is good but video bitrate is a.The present invention relates to a projection exposure apparatus for exposing a substrate in the process of manufacture of micro devices such as ICs,LSIs, etc. More particularly, the invention relates to a projection exposure apparatus, which has a projection optical system for projecting a mask pattern on a substrate for exposure.
In projection exposure apparatuses of the type referred to above, a projection optical system of an exposure apparatus is moved to a target position for optimum projection exposure.
In order to make the exposure process stable for an apparatus of the above-described type, it is necessary to take measures to detect, and to record, the position of the projection optical system. In order to improve the resolution, it is desirable to accurately detect the position of the projection optical system.
For example, in an exposure apparatus for exposing a substrate in the process of manufacture of LSIs, etc., it is necessary to move the substrate and the projection optical system in the two directions perpendicular to the optical axis of the projection optical system. Accordingly, it is necessary to detect, and to record, the position of the projection optical system in the two directions perpendicular to the optical axis. Further, the position of the projection optical system in the direction of the optical axis is very important in controlling the positioning of the projection optical system, since if the positioning of the projection optical system in the direction of the optical axis is poor, the exposure field of the substrate is displaced from the predetermined exposure field, and is deviated from the target position for exposure, thus causing a reduction of the exposure accuracy.
In order to detect the position of the projection optical system in the two directions perpendicular to the optical axis, it is necessary to perform highly accurate detection. For example, detection of the positions of the projection optical system in the two directions perpendicular to the optical axis is typically performed by three light receivers disposed at the upper and lower planes and a focus sensor disposed at a position closer to the projection optical system than the light receivers, and by detecting the positional relationship of the three light receivers and the focus sensor.
Generally, light receivers are positioned at the upper and lower planes, and a light source such as a laser beam is projected onto the upper plane and the lower plane.
However, in the exposure apparatus, particularly in the exposure apparatus of the step-and-repeat type or step-and-scan type, exposure by scanning is
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